Integrated circuit

ABSTRACT

A semiconductor device includes several first cell rows extending in a first direction, each of the first cell rows having a first row height; several second cell rows extending in the first direction, each of the second cell rows having a second row height smaller than the first row height, wherein the first cell rows and the second cell rows are interlaced; a first cell arranged in a first row of the first cell rows; and at least one second cell arranged in at least one row of the second cell rows, wherein the at least one second cell abuts the first cell in a second direction different from the first direction, wherein the at least one second cell and at least one circuit component included in the first cell have the same operation configuration.

BACKGROUND

Integrated circuits have been widely used for various kinds ofapplications, and the demand for faster processing speed and lower powerconsumption is increasing. However, the gate oxide breakdown highlyinfluences the performance and the reliability of the integratedcircuit.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1A is a top view diagram of part of a semiconductor device, inaccordance with some embodiments.

FIG. 1B is a top view diagram of part of the semiconductor device inFIG. 1A, in accordance with various embodiments.

FIG. 2 is a sectional view diagram illustrating a structure of some cellrows along a sectional line in FIG. 1A in accordance with someembodiments.

FIG. 3A is an equivalent circuit of part of an integrated circuitincluding structures corresponding to the semiconductor device in FIG.1A, in accordance with some embodiments.

FIG. 3B is a direct acyclic diagram corresponding to the equivalentcircuit of part of the integrated circuit in FIG. 3A, in accordance withsome embodiments.

FIG. 3C is a layout diagram in a plan view of part of the integratedcircuit corresponding to part of FIG. 3A, in accordance with someembodiments.

FIG. 3D is another layout diagram in the plan view of part of theintegrated circuit corresponding to part of FIG. 3A, in accordance withsome embodiments.

FIG. 4A is an equivalent circuit of part of an integrated circuitincluding structures corresponding to the semiconductor device in FIG.1A, in accordance with some embodiments.

FIG. 4B is a direct acyclic diagram corresponding to the equivalentcircuit of part of the integrated circuit in FIG. 4A, in accordance withsome embodiments.

FIG. 4C is a layout diagram in a plan view of part of the integratedcircuit corresponding to part of FIG. 4A, in accordance with someembodiments.

FIG. 5A is an equivalent circuit of part of an integrated circuitincluding structures corresponding to the semiconductor device in FIG.1A, in accordance with some embodiments.

FIG. 5B is a direct acyclic diagram corresponding to the equivalentcircuit of part of the integrated circuit in FIG. 5A, in accordance withsome embodiments.

FIG. 5C is a layout diagram in a plan view of part of the integratedcircuit corresponding to part of FIG. 5A, in accordance with someembodiments.

FIG. 6A is an equivalent circuit of part of an integrated circuitincluding structures corresponding to the semiconductor device in FIG.1A, in accordance with some embodiments.

FIG. 6B is a direct acyclic diagram corresponding to the equivalentcircuit of part of the integrated circuit in FIG. 6A, in accordance withsome embodiments.

FIG. 6C is a layout diagram in a plan view of part of the integratedcircuit corresponding to part of FIG. 6A, in accordance with someembodiments.

FIG. 7A is an equivalent circuit of part of an integrated circuitincluding structures corresponding to the semiconductor device in FIG.1A, in accordance with some embodiments.

FIG. 7B is a direct acyclic diagram corresponding to the equivalentcircuit of part of the integrated circuit in FIG. 7A, in accordance withsome embodiments.

FIG. 7C is a layout diagram in a plan view of part of the integratedcircuit corresponding to part of FIG. 7A, in accordance with someembodiments.

FIG. 8A is an equivalent circuit of part of an integrated circuitincluding structures corresponding to the semiconductor device in FIG.1A, in accordance with some embodiments.

FIG. 8B is a direct acyclic diagram corresponding to the equivalentcircuit of part of the integrated circuit in FIG. 8A, in accordance withsome embodiments.

FIG. 8C is a layout diagram in a plan view of part of the integratedcircuit corresponding to part of FIG. 8A, in accordance with someembodiments.

FIG. 9 is a flow chart of a method of generating a layout design fordesigning the layout of the integrated circuit and fabricating theintegrated circuit, in accordance with some embodiments of the presentdisclosure.

FIG. 10 is a block diagram of a system for designing the integratedcircuit layout design, in accordance with some embodiments of thepresent disclosure.

FIG. 11 is a block diagram of an integrated circuit manufacturingsystem, and an integrated circuit manufacturing flow associatedtherewith, in accordance with some embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

The terms used in this specification generally have their ordinarymeanings in the art and in the specific context where each term is used.The use of examples in this specification, including examples of anyterms discussed herein, is illustrative only, and in no way limits thescope and meaning of the disclosure or of any exemplified term.Likewise, the present disclosure is not limited to various embodimentsgiven in this specification.

As used herein, the terms “comprising,” “including,” “having,”“containing,” “involving,” and the like are to be understood to beopen-ended, i.e., to mean including but not limited to.

Reference throughout the specification to “one embodiment,” “anembodiment,” or “some embodiments” means that a particular feature,structure, implementation, or characteristic described in connectionwith the embodiment(s) is included in at least one embodiment of thepresent disclosure. Thus, uses of the phrases “in one embodiment” or “inan embodiment” or “in some embodiments” in various places throughout thespecification are not necessarily all referring to the same embodiment.Furthermore, the particular features, structures, implementation, orcharacteristics may be combined in any suitable manner in one or moreembodiments.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly. As used herein, the term“and/or” includes any and all combinations of one or more of theassociated listed items.

As used herein, “around”, “about”, “approximately” or “substantially”shall generally refer to any approximate value of a given value orrange, in which it is varied depending on various arts in which itpertains, and the scope of which should be accorded with the broadestinterpretation understood by the person skilled in the art to which itpertains, so as to encompass all such modifications and similarstructures. In some embodiments, it shall generally mean within 20percent, preferably within 10 percent, and more preferably within 5percent of a given value or range. Numerical quantities given herein areapproximate, meaning that the term “around”, “about”, “approximately” or“substantially” can be inferred if not expressly stated, or meaningother approximate values.

Reference is now made to FIG. 1A. FIG. 1A is a top view diagram of partof a semiconductor device, in accordance with some embodiments. Asillustratively shown in FIG. 1A, the semiconductor device 10 includesseveral cell rows ROW1-ROW4 and cells CELL1-CELL4. In some embodiments,the cells CELL1-CELL4 are implemented by integrated circuits arranged inthese cell rows ROW1-ROW4. In some embodiments, each of the cellsCELL1-CELL4 is implemented as a logic gate circuit including AND, OR,NAND, MUX, Flip-flop, Latch, BUFF, inverter, the combination thereof, orany other types of logic circuit. The number of the cell rows ROW1-ROW4in the semiconductor device 10 in FIG. 1A is given for illustrativepurposes. Various numbers of the cell rows ROW1-ROW4 are within thecontemplated scope of the present disclosure. For example, in someembodiments, the number of the cell rows in the semiconductor device 10is more than 4.

For illustration, the cell rows ROW1-ROW4 extends along x direction andare parallel to each other. In some embodiments, the cell rows ROW1-ROW4are arranged along y direction, which is substantially perpendicular tothe x direction.

In some embodiments, there are two groups of cell rows among the rowsROW1-ROW4 in reference with their row heights. As illustratively shownin FIG. 1A, each of the cell rows ROW1 and ROW3 is configured to have arow height H1, and each of the cell rows ROW2 and ROW4 is configured tohave another row height H2, which is shorter than the row height H1. Thecell rows ROW1 and ROW3 with the row height H1 are regarded as a firstgroup “A” of the cell rows ROW1-ROW4, and the cell rows ROW2 and ROW4are regarded as a second group “B” of the cell rows ROW1-ROW4. In someembodiments, as depicted in FIG. 1A, the first group A of the cell rowsand the second group B of the cell rows are interlaced.

For illustration, the cell row ROW1 with the row height H1 in the firstgroup “A” includes two active areas 210-220, and the cell row ROW2 withthe row height H2 in the second group “B” includes two active areas230-240. Similarly, the cell row ROW3 includes two active areas 250-260,and the cell row ROW4 includes two active areas 270-280. Forillustration, the active areas 210-280 extend along x direction and areseparate from each other in y direction. The configurations of theactive areas 210-280 will be discussed in the following paragraphs withFIG. 2.

In some embodiments, the active areas 210 and 240 have a conductivity ofP type, while the active areas 220 and 230 have a conductivity of Ntype. The configurations of the active areas 250 and 280 are similar tothe active areas 210 and 240, and the configurations of the active areas260 and 270 are similar to the active areas 220 and 230. Alternativelystated, the cell rows ROW1-ROW4 are interlaced in a periodic sequencealong y direction. The configurations of the active areas 210-280 aregiven for illustrative purposes. Various implements of the active areas210-280 are included in the contemplated scope of the presentdisclosure. For example, in some embodiments, the active areas 210, 240,250, and 280 are N type and the active areas 220, 230, 260 and 270 are Ptype.

As illustratively shown in FIG. 1A, the cell CELL1 includes sub-cells110 and 120. The sub-cells 110 and 120 abut each other along ydirection. The sub-cells 110 and 120 are arranged in the cell rows ROW1and ROW2 respectively. The sub-cell 110 includes the active areas210-220, and the sub-cell 120 includes the active areas 230-240.

In some embodiments, the sub-cell 110 includes a logic gate circuitincluding AND, OR, NAND, MUX, Flip-flop, Latch, BUFF, inverter, or anyother types of logic circuit, while the sub-cell 120 includes a shadowlogic gate circuit. In such embodiments, the shadow logic gate circuitand at least one circuit component included in the sub-cell 110 have thesame operation configurations. For example, in some embodiments, thesub-cell 110 includes several N type transistors and P type transistors.The sub-cell 120 includes a P type transistor coupled in parallel to acorresponding one of the P type transistors of the sub-cell 110 and a Ntype transistor coupled in parallel to a corresponding one of the N typetransistors of the sub-cell 110. The P type transistor in sub-cell 120and the corresponding one of the P type transistors of sub-cell 110 areconfigured to cooperate in response to a first signal at gates thereof,while the N type transistor in sub-cell 120 and the corresponding one ofthe N type transistors of sub-cell 110 are configured to cooperate inresponse to a second signal at gates thereof. Alternatively stated, thecircuit component(s) in sub-cell 120 is(are) configured as aduplication(s) of a corresponding one(s) component in sub-cell 110 tooperate with same configuration. The details of sub-cells 110-120 willbe discussed with FIGS. 3A-3D, and 7A-7D as examples.

As discussed above, the cell CELL1 operates while the sub-cell 110 isconfigured as the main logic circuit and the sub-cell 120 is configuredas the shadow logic circuit. In some approaches, the semiconductordevice includes shadow logic circuit corresponding to sub-cell 120having transistors, coupled to main logic circuit corresponding tosub-cell 110, to extend cell lifetime. However, because of cell basedesign rectangle shape nature, the shadow logic circuit and the mainlogic circuit of some approaches are arranged in the same cell row undera single cell row height architecture (SCRHA) and abut with each otherin a direction which the cell rows extend. In such arrangements, itresults in not only large area overhead but also poor cell performancedue to larger pin cap.

With the configurations of mixed cell row heights of the presentdisclosure, the shadow logic circuit in the sub-cell 120 is arranged ina reduced height cell row while the main logic circuit in the sub-cell110 is arranged in a normal height cell row. In such embodiments, if anoxide failure happens to a transistor, for example, at gate of thetransistor, in the sub-cell 110, a corresponding redundant transistor,coupled to that transistor in the sub-cell 110, in the sub-cell 120 isstill capable to function to maintain the circuit operations. Therefore,not only is the improved reliability provided by the shadow logiccircuit in the sub-cell 120, the configurations of the aforementionedmix cell row height architect (MCRHA) has smaller area overhead andsmaller pin cap overhead, compared with some approaches. Alternativelystated, the mix cell row architecture of the present disclosure possessadvantages in smaller core area while keeping high possibility topersist identical performance to the single cell row heightarchitecture.

The configurations of the cell CELL1 of FIG. 1A are given forillustrative purposes. Various embodiments of the cell CELL1 areincludes in the contemplated scope of the present disclosure. Forexample, in some embodiments discussed in the following paragraphs, acell corresponding to the sub-cell 120 includes only P type transistorsor N type transistors.

With continued reference to FIG. 1A, for illustration, the semiconductordevice 10 includes a cell CELL2. Compared with the cell CELL1, insteadof including the N type active area 230 and the P type active area 240in the same cell row ROW2, the cell CELL2 includes the active area 240in a portion, having a height H3, of the cell ROW2 and the active area270 in a portion, having the height H3, of the cell row ROW4. The cellCELL2 also includes the active areas 250-260 in the cell row ROW3interposed between the cell rows ROW2 and ROW4.

As illustratively shown in FIG. 1A, the cell CELL2 includes the sub-cell110, and further sub-cells 130-140. The sub-cell 110 is interposedbetween and abuts the sub-cells 130 and 140. The sub-cell 110 isarranged in the cell row ROW3. The sub-cells 130 and 140 are arranged inthe cell rows ROW2 and ROW4 respectively. Alternatively stated, thesub-cells 130-140 are arranged on the opposite sides of the sub-cell110.

The sub-cell 110 includes the active areas 250-260. The sub-cell 130includes the active area 240, and the sub-cell 140 includes the activearea 270. As discussed above, in some embodiments, the active areas240-250 are P type and the active areas 260-270 are N type.

In some embodiments, the sub-cell 130 includes shadow logic P typedevices including, for example, one or more transistors corresponding toP type transistors in sub-cell 110. The sub-cell 140 includes shadowlogic N type devices including, for example, one or more transistorscorresponding to N type transistors in sub-cell 110. Alternativelystated, compared with the cell CELL1, the sub-cell 120 is implemented bytwo sub-cells 130-140 arranged on the opposite sides of sub-cell 110,the sub-cell 130 including the P type transistors of the sub-cell 120and the sub-cell 140 including the N type transistors of the sub-cell120. In such embodiments, the cell CELL2 operates while the sub-cell 110is configured as the main logic circuit and the sub-cells 130-140 areconfigured as separated shadow logic circuit.

With continued reference of FIG. 1A, for illustration, the semiconductordevice 10 includes a cell CELL3. Compared with the cell CELL2, insteadof having both the sub-cells 130-140, the cell CELL3 includes only thesub-cell 140. In some embodiments, the cell CELL3 operates while thesub-cell 110 is configured as the main logic circuit and the sub-cell140 is configured as the shadow logic circuit having N type transistors.

Furthermore, the semiconductor device 10 includes a cell CELL4. Comparedwith the cell CELL2, instead of having both the sub-cells 130-140, thecell CELL4 includes only the sub-cell 130. In some embodiments, the cellCELL4 operates while the sub-cell 110 is configured as the main logiccircuit and the sub-cell 130 is configured as the shadow logic circuithaving P type transistors.

In some embodiments, a simulation is conducted to identify the mostvulnerable transistor(s), and accordingly redundant transistors areinserted in the shadow logic circuit (i.e., in the sub-cells 120-140 inFIG. 1A) to couple with the vulnerable transistor(s). Based on a numberof the redundant transistors, one of layout configurations (i.e., thecells CELL1-CELL4 or any other suitable layout structure) is determinedfor an integrated circuit formed on the semiconductor device. The method900 of identifying the transistors and determining the layoutconfiguration will be discussed in detail in the later paragraphs withFIG. 9.

Reference is now made to FIG. 1B. FIG. 1B is a top view diagram of partof the semiconductor device 10 in FIG. 1A, in accordance with variousembodiments. With respect to the embodiments of FIG. 1A, like elementsin FIG. 1B are designated with the same reference numbers for ease ofunderstanding. The specific operations of similar elements, which arealready discussed in detail in above paragraphs, are omitted herein forthe sake of brevity, unless there is a need to introduce theco-operation relationship with the elements shown in FIG. 1B.

For illustration, the semiconductor device 10 further includes cellsCELL5-CELL8. In some embodiments, each of the cells CELL5-CELL8 isimplemented as a logic gate circuit including AND, OR, NAND, MUX,Flip-flop, Latch, BUFF, inverter, the combination thereof, or any othertypes of logic circuit. In some embodiments, the cells CELL5-CELL8 areimplemented by assembling some of the sub-cells 110-140 and a sub-cell150 along y direction. In some embodiments, the sub-cells 110 and 150have the same configuration. In some alternative embodiments, thesub-cells 110 and 150 have different configurations.

Specifically, compared with the cell CELL2 of FIG. 1A, instead of havingthe sub-cell 140, the cell CELL5 includes the sub-cell 120 arranged inthe cell row ROW4. For illustration, the sub-cell 110 is interposedbetween the sub-cells 120-130. Accordingly, there are more P type activeareas than N type active areas in the cell CELL5 to form P typetransistors in shadow logic circuit.

Compared with the cell CELL5, instead of having more P type active areasthan N type active areas, the cell CELL6 includes the sub-cell 120arranged in the cell row ROW2 and the sub-cell 140 arranged in the cellrow ROW4. Accordingly, there are more N type active areas than P typeactive areas in the cell CELL6 to form N type transistors in the shadowlogic circuits.

For illustration, compared with the cells CELL5 and CELL6 that haveasymmetric numbers of N type and P type active areas in the shadow logiccircuits, the cell CELL7 includes two sub-cells 120 arranged on theopposite sides of the sub-cell 110. In such embodiments, the cell CELL7has double shadow logic circuits in respect to the cell CELL1 of FIG.1A. Accordingly, the reliability of the circuit formed with theconfiguration of the cell CELL7 increases.

The configurations of FIGS. 1A-1B are given for illustrative purposes.Various implements are included in the contemplated scope of the presentdisclosure. For example, the semiconductor device 10 further includes acell having the sub-cell 110 arranged in the cell row ROW3 and asub-cell which abuts the sub-cell 110 along y direction and extends in xdirection, having a width wider than a width of the sub-cell 130 of FIG.1A. Accordingly, more P redundant transistors are allowed to be formedin the sub-cell for operation.

Reference is now made to FIG. 2. FIG. 2 is a sectional view diagramillustrating a structure of the cell rows ROW1-ROW2 along a sectionalline AA′ in FIG. 1A in accordance with some embodiments. With respect tothe embodiments of FIG. 1A, like elements in FIG. 2 are designated withthe same reference numbers for ease of understanding.

As illustratively shown in FIG. 2, the cell row ROW1 with the row heightH1 in the first group “A” includes the active areas 210-220 on asubstrate Sub. The active area 210 of the cell row ROW1 includes twofin-shaped structures 211 and 212, and the active area 220 of the cellrow ROW1 includes another two fin-shaped structures 221 and 222.Alternatively stated, each one of the active areas 210-220 include twofin-shaped structures, such as 211 and 212, or 221 and 222.

In some embodiments, the fin-shaped structures 211 and 212 are n-typefin-shaped structures, and the fin-shaped structures 221 and 222 arep-type fin-shaped structures. In some other embodiments, the fin-shapedstructures 211 and 212 are p-type fin-shaped structures, and thefin-shaped structures 221 and 222 are n-type fin-shaped structures.

As illustratively shown in FIG. 2, the cell row ROW2 with the row heightH2 in the second group “B” includes two active areas 230-240 on thesubstrate Sub. The active area 230 of the cell row ROW2 includes a firstone fin-shaped structure, and the active area 240 of the cell row ROW2includes a second one fin-shaped structure. Alternatively stated, eachone of the active areas 230-240 include one fin-shaped structure.

The fins mentioned above may be patterned by any suitable method. Forexample, the fins may be patterned using one or more photolithographyprocesses, including double-patterning or multi-patterning processes.Generally, double-patterning or multi-patterning processes combinephotolithography and self-aligned processes, allowing patterns to becreated that have, for example, pitches smaller than what is otherwiseobtainable using a single, direct photolithography process. For example,in one embodiment, a sacrificial layer is formed over a substrate andpatterned using a photolithography process. Spacers are formed alongsidethe patterned sacrificial layer using a self-aligned process. Thesacrificial layer is then removed, and the remaining spacers may then beused to pattern the fins.

In some embodiments, such an active area may include one or morefin-shaped structures of one or more three-dimensionalfield-effect-transistors (e.g., FinFETs, gate-all-around (GAA)transistors), or an oxide-definition (OD) region of one or more planarmetal-oxide-semiconductor field-effect transistors (MOSFETs). The activeregion may serve as a source feature or a drain feature of therespective transistor (s).

In some embodiments, the active area 210 of the cell row ROW1 includestwo fin-shaped structures 211 and 212 together as an active region toform an integrated circuit component (such as a transistor), such thatan equivalent width of the active region of the integrated circuitcomponent disposed on the active area 210 will be wider than one ofanother integrated circuit component disposed on the active area 230,which includes the first one fin-shaped structure. Alternatively stated,in some embodiments, integrated circuit components disposed on the cellrow ROW1 have a better performance than integrated circuit componentsdisposed on the cell row ROW2.

Reference is now made to FIGS. 3A-3B. FIG. 3A is an equivalent circuitof part of an integrated circuit 30 including structures correspondingto the semiconductor device 10 in FIG. 1A, in accordance with someembodiments. FIG. 3B is a direct acyclic diagram corresponding to theequivalent circuit of part of the integrated circuit 30 in FIG. 3A, inaccordance with some embodiments.

As illustratively shown in FIG. 3A, the integrated circuit 30 includes afirst circuit having transistors M1-M6 and a second circuit havingtransistors S1-S6. The integrated circuit 30 is coupled between a supplyvoltage VDD and a ground. In some embodiments, the integrated circuit 30is included in the cell, for example, the cell CELL1 of FIG. 1A, whilethe first circuit is included in the sub-cell 110 of FIG. 1A andoperates as the main logic circuit and the second circuit is included inthe sub-cell 120 of FIG. 1A and operates as the shadow logic circuit.

In some embodiments, the transistors M1-M2, M5, S1-S2 and S5 are N typetransistors. The transistors M3-M4, M6, S3-S4 and S6 are P typetransistors.

Specifically, the transistors M1, M4, S1 and S2 include gates to receivea signal A. The transistors M2, M3, S2 and S3 include gates to receive asignal B. The transistors M1-M2, M5, S1-S2 and S5 include firstterminals to be coupled to the ground. The transistors M4, M6, S4 and S6include first terminals to be coupled to the supply voltage VDD. Asecond terminal of the transistor M4 is coupled to first terminals ofthe transistors M3 and S3. A second terminal of the transistor M3 iscoupled to a second terminal of the transistor S3, second terminals ofthe transistors M1-M2, second transistors of the transistors S1-S2, andgates of the transistors M5-M6 and S5-S6. Second terminals of thetransistors M5-M6 and S5-S6 are coupled together at an output node Z.

Based on the discussed above, alternatively stated, the transistor S1 iscoupled in parallel to the transistor M1, being as a redundanttransistor. The relationships between the transistors S2-S6 and thetransistor M2-M6 are similar to that of the transistors S1 and M1. Thus,the repetitious descriptions are omitted here.

With reference to FIG. 3B, the direct acyclic diagram shown in FIG. 3Bis drawn based on a netlist of the integrated circuit 30 shown in FIG.3A. For illustration, vertexes marked with “M1-M6” correspond to thetransistors M1-M6 of FIG. 3A separately and are referred as vertexesM1-M6 for ease of understanding. Vertexes marked with “S1-S6” correspondto the transistors S1-S6 of FIG. 3A separately and are referred asvertexes S1-S6 for ease of understanding. A vertex marked with “A”corresponds to a pin transmitting the signal A and is referred as avertex A for ease of understanding, and a vertex marked with Bcorresponds to a pin transmitting the signal B is referred as a vertex Bfor ease of understanding. A vertex marked with “Z” corresponds to a pincoupled to the output node and is referred as a vertex Z for ease ofunderstanding. In some embodiments, the vertexes A and B are independentvertexes. Arrays depicted in FIG. 3B indicate the output and inputrelationships between two vertexes (i.e., two transistors or a pin and atransistor).

As shown in FIG. 3B, the vertex A being connected to the vertexes M1,S1, M4, and S4 denotes that the signal A is output to inputs of thetransistors M1, S1, M4, and S4. The vertexes M4 and S4 being connectedto the vertexes M3 and S3 denotes that the outputs of the transistors M4and S4 are the inputs of the transistors M3 and S3. Furthermore, thevertexes M3 and S3 being connected to the vertexes M5 and S5 denotesthat the outputs of the transistors M3 and S3 are the inputs of thetransistors M5 and S5. The vertexes M4 and S4 being connected to thevertex Z denotes that the outputs of transistors M5 and S5 are an inputfor the pin Z. Alternatively stated, the transistors M3-M4 and S3-S4 areincluded in the operation of transmitting the supply voltage VDD formanipulating the transistors M5 and S5. In addition, after beingconnected to the vertex A, the vertexes M1 and S1 being connected to thevertexes M6 and S6 denotes that the outputs of the transistors M1 and S1are the inputs of the transistors M6 and S6. The vertexes M6 and S6being connected to the vertex Z denotes that the outputs of transistorsM6 and S6 are another input for the pin Z. Alternatively stated, thetransistors M1 and S1 are included in the operation of transmitting theground voltage level for manipulating the transistors M6 and S6.

Moreover, the vertex B being connected to the vertexes M2 and S2 denotesthat the signal B is output to inputs of the transistors M2 and S2. Thevertexes M2 and S2 being connected to the vertexes M6 and S6 denotesthat the outputs of the transistors M2 and S2 are the inputs of thetransistors M6 and S6. As mentioned above, the vertexes M6 and S6 beingconnected to the vertex Z denotes that the outputs of transistors M6 andS6 are another input for the pin Z. Alternatively stated, thetransistors M2 and S2 are further included in the operation oftransmitting the ground voltage level for manipulating the transistorsM6 and S6.

With continued reference to FIG. 3B, values SP_(A)-SP_(B) indicateprobabilities of element failures at the pins which receive the signalsA and B for the integrated circuit 30. In some embodiments, during thesimulation of the netlist of the integrated circuit 30, the pins arerendered without any element failures.

Values SP₁-SP₆ indicate probabilities of element failures at thetransistors M1-M6 separately. In some embodiments, the element failuresat the transistors M1-M6 includes, for example, a gate oxide breakdown.The gate oxide breakdown is defined as the point in time when aconducting path is created between the gate and the substrate of atransistor. In some cases, the conducting path originates from a slowdestruction over time called time-dependent dielectric breakdown (TDDB).For example, in a chain of events, including, for example, in theoperation of the transistor a current flow increasing, heat increasing,thermal damage occurring, more charge traps in the gate oxide, and theconduction increasing. As a result, the gate oxide breakdown isaccelerated and results in a failing transistor. Accordingly, based on asimulated result of the netlist of the integrated circuit under someoperation parameters, the values SP₁-SP₆ are obtained and the mostvulnerable transistor(s) in the circuit is/are identified.Correspondingly, as mentioned before, one or more redundant transistorsare added in the circuit in case the main transistor is failed inoperations. The method 900 of identifying the transistors anddetermining the corresponding layout configuration will be discussed indetail in the later paragraphs with FIG. 9.

Reference is now made to FIG. 3C. FIG. 3C is a layout diagram in a planview of part of the integrated circuit 30 corresponding to a part ofFIG. 3A, in accordance with some embodiments. With respect to theembodiments of FIGS. 1A-3B, like elements in FIG. 3C are designated withthe same reference numbers for ease of understanding. The specificoperations of similar elements, which are already discussed in detail inabove paragraphs, are omitted herein for the sake of brevity, unlessthere is a need to introduce the co-operation relationship with theelements shown in FIG. 3C.

For illustration, the integrated circuit 30 includes a layoutconfiguration of the cell CELL1 of FIG. 1A, in which the sub-cell 110and 120 abut along y direction. As shown in FIG. 3C, the integratedcircuit 30 further includes the active areas (i.e., oxide diffusions,OD) 210-240, gates (i.e., poly) 310-370, conductive patterns (i.e.,metal-to-devices, MD) 401-411, conductive lines (i.e., metal-zero lines,M0) 501-503, 504 a-504 b, 505-508, 509 a-509 b, and 510-512, conductivetraces (i.e., metal-one lines, M1) 601-604, and vias VG1-VG3, VD1-VD9,and VM1-VM8 in the sub-cells 110 and 120. In some embodiments, theactive areas 210-240 are arranged in a first layer on the substrate Subof FIG. 2. The gates 310-370 and the conductive patterns 401-411 arearranged in a second layer above the first layer. The conductive lines501-503, 504 a-504 b, 505-508, 509 a-509 b, and 510-512 are arranged ina third layer above the second layer. The conductive traces 601-604 arearranged in a fourth layer above the third layer. The vias VD1-VD9 arearranged between the first and second layers. The vias VG1-VG3 arearranged between the second and third layers. The vias VM1-VM8 arearranged between the third and fourth layers.

With reference to FIGS. 3A and 3C, the active areas 210-220 areconfigured for the formation of the transistors M1-M6, and the activeareas 230-240 are configured for the formation of the transistors S1-S6.

The conductive pattern 401 corresponds to the second terminal of thetransistor M3. The conductive pattern 402 corresponds to the firstterminal of the transistor M3 and the second terminal of the transistorM4. The conductive pattern 403 corresponds to the first terminals of thetransistors M4 and M6. The conductive pattern 404 corresponds to thesecond terminals of the transistors M5-M6. The conductive pattern 405corresponds to the first terminals of the transistors M2 and S2. Theconductive pattern 406 corresponds to the second terminals of thetransistors M1-M2 and S1-S2. The conductive pattern 407 corresponds tothe first terminals of the transistors M1, M5, S1, and S5. Theconductive pattern 408 corresponds to the second terminal of thetransistor S3. The conductive pattern 409 corresponds to the firstterminal of the transistor S3 and the second terminal of the transistorS4. The conductive pattern 410 corresponds to the first terminals of thetransistors S4 and S6. The conductive pattern 411 corresponds to thesecond terminals of the transistors S5-S6.

The gates 310, 350-360, and 370 are referred to as dummy gates, in whichin some embodiments, the “dummy” gate is referred to as being notelectrically connected as the gate for MOS devices, having no functionin the circuit.

A first portion of the gate 320 above the active area 210 corresponds tothe gate of the transistor M3, a second portion of the gate 320 abovethe active area 220 corresponds to the gate of the transistor M2, athird portion of the gate 320 above the active area 230 corresponds tothe gate of the transistor S2, and a fourth portion of the gate 320above the active area 240 corresponds to the gate of the transistor S3.

A first portion of the gate 330 above the active area 210 corresponds tothe gate of the transistor M4, a second portion of the gate 330 abovethe active area 220 corresponds to the gate of the transistor M1, athird portion of the gate 330 above the active area 230 corresponds tothe gate of the transistor S1, and a fourth portion of the gate 330above the active area 240 corresponds to the gate of the transistor S4.

A first portion of the gate 340 above the active area 210 corresponds tothe gate of the transistor M6, a second portion of the gate 340 abovethe active area 220 corresponds to the gate of the transistor M5, athird portion of the gate 340 above the active area 230 corresponds tothe gate of the transistor S5, and a fourth portion of the gate 340above the active area 240 corresponds to the gate of the transistor S6.

As illustratively shown in FIG. 3C, the active areas 210-240 extend in xdirection and are separate from each other in y direction. As mentionedabove, in some embodiments, each of the active areas 210-220 includesthe two fin-shaped structures 211 and 212 of FIG. 2, and each the activeareas 230-240 include the first and second one fin-shaped structurerespectively.

The gates 310-370 extend in y direction and are separate from each otherin x direction. Furthermore, the gates 320-340 extend through thesub-cells 110 and 120, and cross the active areas 210-240.

The conductive patterns 401-411 extend in y direction. The conductivepatterns 401-403 cross the active area 210. The conductive pattern 404crosses both the active areas 210-220. The conductive patterns 401-403cross the active areas 220-230. The conductive patterns 408-410 crossthe active area 240. The conductive pattern 401 crosses both the activeareas 230-240.

The conductive lines 501-503, 504 a-504 b, 505-508, 509 a-509 b, and510-512 extend in x direction and are separate from each other in ydirection. The conductive line 501 crosses the conductive pattern 403and the gates 310-350. The conductive lines 502-503 cross the conductivepatterns 401-404 and the gates 320-340. The conductive line 504 acrosses the gate 320, and the conductive line 504 b crosses theconductive pattern 404 and the gate 340. The conductive lines 505-507cross the conductive patterns 405-407 and the gates 320-340, and theconductive lines 505-506 further cross the conductive pattern 404. Theconductive line 508 crosses the conductive patterns 405-407 and 411. Theconductive line 509 a crosses the gate 320, and the conductive line 509b crosses the conductive pattern 411 and the gate 340. The conductiveline 510 crosses the conductive pattern 411 and the gates 320-340. Theconductive line 511 crosses the conductive patterns 408-411 and thegates 320-340. The conductive line 512 crosses the conductive pattern410.

The conductive traces 601-604 extend in y direction through thesub-cells 110-120 and are separate from each other in x direction. Forillustration, the conductive traces 601-602 cross the conductive lines502-503, 504 a, 505-508, 509 a, and 510-511, and cross the conductivelines 501 and 512. The conductive traces 603-604 cross the conductivelines 502-503, 504 b, 505-508, 509 b, and 510-511, and cross theconductive lines 501 and 512.

The via VD2 couples the conductive pattern 403 to the conductive line501, and the via VD7 couples the conductive pattern 410 to theconductive line 512. In some embodiments, the conductive lines 501 and512 output the supply voltage VDD to the conductive patterns 403 and 410respectively. The vias VD4 and VD9 couple the conductive patterns 405and 407 to the conductive line 507 respectively. In some embodiments,the conductive line 507 receives a supply voltage VSS (i.e., in theembodiments of FIG. 3A, the ground) for the integrated circuit 30.

Furthermore, the via VD1 couples the conductive pattern 401 to theconductive line 502. The via VM1 couples the conductive line 502 to theconductive trace 603. Firstly, the via VM4 couples the conductive trace603 to the conductive line 506, and the via VD3 couples the conductiveline 506 to the conductive pattern 406. Accordingly, the conductivepattern 401 is coupled to the conductive pattern 406. In other words,the second terminal of the transistor M3 is coupled to the secondterminals of the transistors M1-M2 and S1-S2. Secondly, the via VM7couples the conductive trace 603 to the conductive line 511, and the viaVD6 couples the conductive line 511 to the conductive pattern 408.Accordingly, the conductive pattern 401 is further coupled to theconductive pattern 408. In other words, the second terminal of thetransistor M3 is coupled to the second terminal of the transistor S3.Thirdly, the via VM3 couples the conductive trace 603 to the conductiveline 504 b, and the via VG3 coupled the conductive line 504 b to thegate 340. Accordingly, the conductive pattern 401 is coupled to the gate340. In other words, the second terminals of the transistors M1-M3, thesecond terminals of the transistors S1-S3, and the gates of thetransistors M5-M6 and S5-S6 are coupled together.

The via VD5 couples the conductive pattern 404 to the conductive line505. The via VM5 couples the conductive line 505 to the conductive trace604. The via VM8 couples the conductive trace 604 to the conductive line509 a. The via VD8 couples the conductive trace 604 to the conductivepattern 411. Accordingly, the conductive pattern 404 is coupled to theconductive pattern 411. In other words, the second terminals of thetransistors M5-M6 and S5-S6 are coupled together.

In some embodiments, the conductive trace 604 receives the outputs ofthe transistors M5-M6 and S5-S6 for the output node Z of FIG. 3A.

The via VG1 couples the gate 330 to the conductive line 510. The via VM6couples the conductive line 510 to the conductive trace 602. In someembodiments, the conductive trace 602 receives the signal A of FIG. 3Afor the gate 330. Accordingly, the gates of the transistors M1, M4, S1,and S4 receive the signal A.

The via VG2 couples the gate 320 to the conductive line 504 a. The viaVM1 couples the conductive line 504 a to the conductive trace 601. Insome embodiments, the conductive trace 601 receives the signal B of FIG.3A for the gate 320. Accordingly, the gates of the transistors M2, M3,S2, and S3 receive the signal B.

Reference is now made to FIG. 3D. FIG. 3D is another layout diagram inthe plan view of part of the integrated circuit 30 corresponding to partof FIG. 3A, in accordance with some embodiments. With respect to theembodiments of FIGS. 1A-3C, like elements in FIG. 3D are designated withthe same reference numbers for ease of understanding. The specificoperations of similar elements, which are already discussed in detail inabove paragraphs, are omitted herein for the sake of brevity, unlessthere is a need to introduce the co-operation relationship with theelements shown in FIG. 3D.

Compared with FIG. 3C, instead of having the layout configuration of thecell CELL1 of FIG. 1A, the integrated circuit 30′ further includes thelayout configuration of the cell CELL2 of FIG. 1A, in which theintegrated circuit 30′ includes the sub-cells 110 and 130-140. As shownin FIG. 3D, instead of having the active areas 210-220, the sub-cell 110of FIG. 3D includes the active areas 250-260. The sub-cell 130 includesthe active areas 240, and the sub-cell 140 includes active area 270.Furthermore, the integrated circuit 30′ further includes conductivelines 513-514 and vias VG4 and VM9. In some embodiments, the conductivelines 513-514 are configured with respect to, for example, theconductive lines 510-511. The via VG4 is configured with respect to, forexample, the via VG1 of FIG. 3C. The via VM9 is configured with respectto, for example, the via VM6 of FIG. 3C.

In some embodiments, the active areas 210-220 of FIG. 3C and the activeareas 250-260 of FIG. 3D have similar configurations, and theconfigurations of the sub-cell 110 of FIG. 3D are similar to that ofFIG. 3C. Thus, the repetitious descriptions are omitted here.

In some embodiments, the active area 270 and the active area 230 of FIG.3C have similar configuration, and the sub-cell 130 includes the sameconfiguration of metal routing for the active area 230 of FIG. 3C.Accordingly, the relationships between the transistors S1-S2, S5 and thelayout structures of FIG. 3D are similar to that of FIG. 3C. Thus, therepetitious descriptions are omitted here.

With reference to FIGS. 3A and 3D, the active area 240 is configured forthe formation of the transistors S3-S4 and S6. The conductive pattern401 further corresponds to the second terminal of the transistor S3. Theconductive pattern 402 further corresponds to the first terminal of thetransistor S3 and the second terminal of the transistor S4. Theconductive pattern 403 further corresponds to the first terminal of thetransistors S4 and S6. The conductive pattern 404 further corresponds tothe second terminal of the transistor S6. As mentioned above, theportion of the gate 320 above the active area 240 corresponds to thegate of the transistor S3. The fourth portion of the gate 330 above theactive area 240 corresponds to the gate of the transistor S4. The fourthportion of the gate 340 above the active area 240 corresponds to thegate of the transistor S6.

For illustration, in the sub-cell 130, the gates 320-340 cross theactive area 240. The conductive patterns 401-404 further extend from thesub-cell 110 to cross the active area 240. The conductive line 513crosses the gates 320-340. The conductive line 514 crosses theconductive patterns 401-404 and the gates 320-340. The conductive traces601-604 further cross the conductive lines 513-514.

The via VG4 couples the gate 330 to the conductive line 513. The via VM9couples the conductive line 513 to the conductive trace 602.Accordingly, the gate of the transistor S4 in sub-cell 130 of FIG. 3Dfurther receives the signal A from the conductive trace 602.

As mentioned before, through the vias VD5, VD8, VM5, and VM8, theconductive lines 505, 509 b, and the conductive trace 604, theconductive pattern 404 is coupled to the conductive pattern 411.Accordingly, the second terminals of the transistors M5-M6 and S5-S6 arecoupled together.

The configurations of FIGS. 3A-3D are given for illustrative purposes.Various implements of FIGS. 3A-3D are within the contemplated scope ofthe present disclosure. For example, in some embodiments, the activeareas 240-250 are N type and the active areas 260-270 are P type.

Reference is now made to FIGS. 4A-4B. FIG. 4A is an equivalent circuitof part of an integrated circuit 40 including structures correspondingto the semiconductor device in FIG. 1A, in accordance with someembodiments. FIG. 4B is a direct acyclic diagram corresponding to theequivalent circuit of part of the integrated circuit 40 in FIG. 4A, inaccordance with some embodiments. With respect to the embodiments ofFIGS. 1A-3D, like elements in FIGS. 4A-4B are designated with the samereference numbers for ease of understanding. The specific operations ofsimilar elements, which are already discussed in detail in aboveparagraphs, are omitted herein for the sake of brevity, unless there isa need to introduce the co-operation relationship with the elementsshown in FIGS. 4A-4B.

Compared with FIGS. 3A-3B, instead of having both P and N typetransistors, for example, the transistors S1-S6, as redundanttransistors, the integrated circuit 40 merely includes N typetransistors as redundant transistors, such like the transistors S1-S2and S5.

Reference is now made to FIG. 4C. FIG. 4C is a layout diagram in a planview of part of the integrated circuit 40 corresponding to part of FIG.4A, in accordance with some embodiments. With respect to the embodimentsof FIGS. 1A-4B, like elements in FIG. 4C are designated with the samereference numbers for ease of understanding. The specific operations ofsimilar elements, which are already discussed in detail in aboveparagraphs, are omitted herein for the sake of brevity, unless there isa need to introduce the co-operation relationship with the elementsshown in FIG. 4C.

Compared with FIG. 3D, instead of the layout structure of the cell CELL2of FIG. 1A, the integrated circuit 40 includes the layout structure ofthe cell CELL5 of FIG. 1A. Alternatively stated, instead of having thesub-cell 130 including the P type transistors S3-S4 and S6, theintegrated circuit 40 merely includes the sub-cell 140 having structurescorresponding to N type transistors S1-S2 and S5.

Reference is now made to FIGS. 5A-5B. FIG. 5A is an equivalent circuitof part of an integrated circuit 50 including structures correspondingto the semiconductor device in FIG. 1A, in accordance with someembodiments. FIG. 5B is a direct acyclic diagram corresponding to theequivalent circuit of part of the integrated circuit 50 in FIG. 5A, inaccordance with some embodiments. With respect to the embodiments ofFIGS. 1A-4C, like elements in FIGS. 5A-5B are designated with the samereference numbers for ease of understanding. The specific operations ofsimilar elements, which are already discussed in detail in aboveparagraphs, are omitted herein for the sake of brevity, unless there isa need to introduce the co-operation relationship with the elementsshown in FIGS. 5A-5B.

Compared with FIGS. 3A-3B, instead of having both P and N typetransistors, for example, the transistors S1-S6, as redundanttransistors, the integrated circuit 50 merely includes P typetransistors as redundant transistors, such like the transistors S3-S4and S6.

Reference is now made to FIG. 5C. FIG. 5C is a layout diagram in a planview of part of the integrated circuit 50 corresponding to part of FIG.5A, in accordance with some embodiments. With respect to the embodimentsof FIGS. 1A-5B, like elements in FIG. 5C are designated with the samereference numbers for ease of understanding. The specific operations ofsimilar elements, which are already discussed in detail in aboveparagraphs, are omitted herein for the sake of brevity, unless there isa need to introduce the co-operation relationship with the elementsshown in FIG. 5C.

Compared with FIG. 3D, instead of the layout structure of the cell CELL2of FIG. 1A, the integrated circuit 50 includes the layout structure ofthe cell CELL4 of FIG. 1A. Alternatively stated, instead of having thesub-cell 140 including the N type transistors S1-S2 and S5, theintegrated circuit 50 merely includes the sub-cell 130 having structurescorresponding to P type transistors S3-S4 and S6.

Reference is now made to FIGS. 6A-6B. FIG. 6A is an equivalent circuitof part of an integrated circuit 60 including structures correspondingto the semiconductor device in FIG. 1A, in accordance with someembodiments. FIG. 6B is a direct acyclic diagram corresponding to theequivalent circuit of part of the integrated circuit 60 in FIG. 6A, inaccordance with some embodiments. With respect to the embodiments ofFIGS. 1A-5C, like elements in FIGS. 6A-6B are designated with the samereference numbers for ease of understanding. The specific operations ofsimilar elements, which are already discussed in detail in aboveparagraphs, are omitted herein for the sake of brevity, unless there isa need to introduce the co-operation relationship with the elementsshown in FIGS. 6A-6B.

Compared with FIGS. 5A-5B, instead of having all P type transistorsS3-S4 and S6 that correspond to all P type transistors M3-M4 and M6 ofthe main logic circuit, the integrated circuit 60 merely includesportions of P type transistors, corresponding to P type transistors ofthe main logic circuit, as redundant transistors, such like thetransistors S4 and S6.

Reference is now made to FIG. 6C. FIG. 6C is a layout diagram in a planview of part of the integrated circuit 60 corresponding to part of FIG.6A, in accordance with some embodiments. With respect to the embodimentsof FIGS. 1A-6B, like elements in FIG. 6C are designated with the samereference numbers for ease of understanding. The specific operations ofsimilar elements, which are already discussed in detail in aboveparagraphs, are omitted herein for the sake of brevity, unless there isa need to introduce the co-operation relationship with the elementsshown in FIG. 6C.

Compared with FIG. 5C, the layout structures corresponding to thetransistor S3 are adjusted. Specifically, the gate 320 does not extendthrough the sub-cell 110 to the sub-cell 130. Instead, the integratedcircuit 60 includes a gate 321 crossing the active area 240, and thegate 321 is electrically isolated from the gate 320. In addition, theconductive pattern 401 does not extend through the sub-cell 110 to thesub-cell 130 as well. Instead, the integrated circuit 60 includes aconductive pattern 412 crossing the active area 240, and the conductivepattern 412 is electrically isolated from the conductive pattern 401.

Reference is now made to FIGS. 7A-7B. FIG. 7A is an equivalent circuitof part of an integrated circuit 70 including structures correspondingto the semiconductor device in FIG. 1A, in accordance with someembodiments. FIG. 7B is a direct acyclic diagram corresponding to theequivalent circuit of part of the integrated circuit 70 in FIG. 7A, inaccordance with some embodiments. With respect to the embodiments ofFIGS. 1A-6C, like elements in FIGS. 7A-7B are designated with the samereference numbers for ease of understanding. The specific operations ofsimilar elements, which are already discussed in detail in aboveparagraphs, are omitted herein for the sake of brevity, unless there isa need to introduce the co-operation relationship with the elementsshown in FIGS. 7A-7B.

Compared with FIGS. 6A-6B, instead of having only one type of transistorS4 and S6, the integrated circuit 70 includes N and P type transistorsas redundant transistors, such like the transistors S2 and S4.

Furthermore, alternatively stated, compared with FIGS. 3A-3B, instead ofhaving all N and P type transistors S1-S6, the integrated circuit 70includes a portion of P type transistors, corresponding to P typetransistors of the main logic circuit such like the transistor S4, and aportion of N type transistors, corresponding to N type transistors ofthe main logic circuit such like the transistor S2.

Reference is now made to FIG. 7C. FIG. 7C is a layout diagram in a planview of part of the integrated circuit 70 corresponding to part of FIG.7A, in accordance with some embodiments. With respect to the embodimentsof FIGS. 1A-7B, like elements in FIG. 7C are designated with the samereference numbers for ease of understanding. The specific operations ofsimilar elements, which are already discussed in detail in aboveparagraphs, are omitted herein for the sake of brevity, unless there isa need to introduce the co-operation relationship with the elementsshown in FIG. 7C.

Compared with FIG. 3D, the layout structures corresponding to thetransistors S1, S3, and S5-S6 are adjusted. Specifically, the gate 320does not cross the active area 240. Instead, the integrated circuit 70includes the gate 321 crossing the active area 240, and the gate 321 iselectrically isolated from the gate 320. The gate 330 does not cross theactive area 270. Instead, the integrated circuit 70 includes a gate 331crossing the active area 270, and the gate 331 is electrically isolatedfrom the gate 330. The gate 340 does not cross the active areas 240 and270. Instead, the integrated circuit 70 includes a gate 341 crossing theactive areas 270 and a gate 342 crossing the active area 240. The gates341-342 are electrically isolated from the gate 340.

The conductive pattern 404 does not extend into the sub-cell 130.Instead, the integrated circuit 70 further includes a conductive pattern414 crossing the active area 240, and the conductive pattern 414 iselectrically isolated from the conductive pattern 404. The conductivepattern 407 does not extend into the sub-cell 140. Instead, theintegrated circuit 70 further includes a conductive pattern 413 crossingthe active area 270, and the conductive pattern 413 is electricallyisolated from the conductive pattern 407.

In addition, for illustration, the vias VD8 and VM8, configured tocouple the conductive pattern 411 to the conductive pattern 404, areexcluded in the embodiments of FIG. 7C.

Reference is now made to FIGS. 8A-8B. FIG. 8A is an equivalent circuitof part of an integrated circuit 80 including structures correspondingto the semiconductor device in FIG. 1A, in accordance with someembodiments. FIG. 8B is a direct acyclic diagram corresponding to theequivalent circuit of part of the integrated circuit 80 in FIG. 8A, inaccordance with some embodiments. With respect to the embodiments ofFIGS. 1A-7C, like elements in FIGS. 8A-8B are designated with the samereference numbers for ease of understanding. The specific operations ofsimilar elements, which are already discussed in detail in aboveparagraphs, are omitted herein for the sake of brevity, unless there isa need to introduce the co-operation relationship with the elementsshown in FIGS. 8A-8B.

Compared with FIGS. 7A-7B, the integrated circuit 80 includes only one Ptype transistor as redundant transistors, such like the transistor S4.

Reference is now made to FIG. 8C. FIG. 8C is a layout diagram in a planview of part of the integrated circuit 80 corresponding to part of FIG.8A, in accordance with some embodiments. With respect to the embodimentsof FIGS. 1A-8B, like elements in FIG. 8C are designated with the samereference numbers for ease of understanding. The specific operations ofsimilar elements, which are already discussed in detail in aboveparagraphs, are omitted herein for the sake of brevity, unless there isa need to introduce the co-operation relationship with the elementsshown in FIG. 8C.

Compared with FIG. 7C, the integrated circuit 80 includes sub-cell 130without including the sub-cell 140.

The configurations of FIGS. 3A-8C are given for illustrative purposes.Various implements of FIGS. 3A-8C are within the contemplated scope ofthe present disclosure. For example, in some embodiments, instead ofhaving only one P type transistor as the redundant transistor, anintegrated circuit includes only one N type transistors as the redundanttransistor, such as, the transistor S2 corresponding the transistor M2.

Reference is now made to FIG. 9. FIG. 9 is a flow chart of the method900 of generating a layout design for designing the layout of theintegrated circuit and fabricating the integrated circuit, in accordancewith some embodiments of the present disclosure. It is understood thatadditional operations can be provided before, during, and after theprocesses shown by FIG. 9, and some of the operations described belowcan be replaced or eliminated, for additional embodiments of the method.The order of the operations/processes may be interchangeable. Throughoutthe various views and illustrative embodiments, like reference numbersare used to designate like elements. The method 900 includes operations910-960 that are described below with reference to the integratedcircuit 10 of FIGS. 1A-1B and the integrated circuits 30-80 of FIGS.3A-8C.

In operation 910, a netlist of the integrated circuit 30 is obtained.

In operation 920, the netlist of the integrated circuit 30 is simulatedwith some operation parameter of the integrated circuit 30, and based onthe result of the simulation, the values SP₁-SP₆ in which eachcorresponds to one of the transistors M1-M6 included in the integratedcircuit 30 are obtained. In some embodiments, the integrated circuit 30includes more than six transistors or less than six transistors.

In operation 930, each of the values SP₁-SP₆ is compared with athreshold value C_(crit). In some embodiments, the threshold valueC_(crit) heavily depends on the process parameter, such like, athickness of the gate oxide layer. Accordingly, the the threshold valueC_(crit) varies with the process and is defined corresponding to theactual applications.

In some embodiments, the values SP₃-SP₄ and SP₆ of P type transistorsare compared with the threshold value C_(crit), and the values SP₁-SP₂and SP₅ of N type transistors are compared with a value (1−C_(crit)).

In operation 940, based on the comparison, when the value correspondingto P type transistor is smaller than the threshold value C_(crit), acorresponding redundant p type transistor is added into the netlist ofthe integrated circuit 30 for generating an adjusted netlist. Forexample, in the embodiments of FIGS. 3A-3B, the values SP₃-SP₄ and SP₆are all equal to 0.2 which is smaller than the threshold value C_(crit)having a value of 0.3. Accordingly, the transistors S3-S4 and S6 areadded into the netlist as shown in FIG. 3B. Similarly, when the valuesSP₁-SP₂ and SP₅ are all equal to 0.2 which is smaller than the value of0.7 (that is, 1 subtracts C_(crit)). Accordingly, the transistors S1-S2and S5 are added into the netlist as shown in FIG. 3B.

In operation 950, based on a number of N type transistors and a numberof P type transistors that are configured as redundant transistors, alayout configuration is determined for the circuit. Alternativelystated, the layout configuration with redundant transistors varies inaccordance with the adjusted netlist. For example, in the embodiments ofFIGS. 4A-4C, no P type transistor is added as a redundant transistorwhile three N type transistors are added. Accordingly, the layoutconfiguration configured with respect to, for example, the cell CELL3 ofFIG. 1A is assigned to the integrated circuit 40.

In the embodiments of FIGS. 5A-6C and 8A-8C, no N type transistor isadded as a redundant transistor while one or more P type transistors areadded. Accordingly, the layout configuration configured with respect to,for example, the cell CELL4 of FIG. 1A is assigned to the integratedcircuits 50, 60, and 80.

In some embodiments, there is at least one of N transistor and at leastone of P transistor that are added as redundant transistors. The method900 further includes operation to determine, based onresistor-and-capacitor values of routing, one of the layoutconfigurations for the circuits. For example, in some embodiments, thelayout configuration as shown by the cell CELL1 of FIG. 1A is determinedfor the integrated circuit, such like, the integrated circuit 30 of FIG.3C processed with small resistor-and-capacitor value forback-end-of-line (BEOL) and larger resistor-and-capacitor value formiddle-end-of-line (MEOL), compared with BEOL. In alternativeembodiments, the layout configuration as shown by the cell CELL2 of FIG.1A is determined for the integrated circuit, such like, the integratedcircuit 30′ of FIG. 3D processed with large resistor-and-capacitor valuefor BEOL and smaller resistor-and-capacitor value for MEOL, comparedwith BEOL.

In some embodiments, the integrated circuit fabrication process is oftenconsidered to include a front-end-of-line (FEOL) portion, themiddle-end-of-line (MEOL) portion, also called a Middle-Of-The-Line(MOL) portion, and the back-end-of-line (BEOL) portion. FEOL is thefirst portion of integrated circuit fabrication wherein individualactive devices are patterned on a semiconductor wafer. FEOL processesinclude: selecting the type of semiconductor wafer to be used;chemical-mechanical planarization and cleaning of the wafer; shallowtrench isolation (STI); well formation, gate module formation, andsource and drain creation. FEOL does not include the deposition of metalinterconnect layers. MEOL processes occur after FEOL processes andinclude gate contact formation and under bump metallization (UBM)processes. BEOL is the final portion of the integrated circuitfabrication process where the individual devices (transistors,capacitors, resistors, etc.) are interconnected with vias and conductivetraces, e.g., metal lines. BEOL generally begins when the first layer ofmetal is deposited and includes contacts, insulating layers(dielectrics), metal levels, and bonding sites for chip-to-packageconnections. In some embodiments, ten or more metal layers are added inthe BEOL portion.

In some embodiments, the method 900 includes assigning one of the layoutconfigurations referred to the cells CELL5-CELL8 to an integratedcircuit in order to add more redundant transistors of one or moreparticular conductivity types. The operation of assigning mentionedabove, in some embodiments, is associated with the number of N typetransistors and the number of P type transistors that are configured asredundant transistors.

In operation 960, the layout, such like, FIGS. 3C-3D, 4C, 5C, 6C, 7C and8C, for the integrated circuit is generated.

Reference is now made to FIG. 10. FIG. 10 is a block diagram ofelectronic design automation (EDA) system 1000 for designing theintegrated circuit layout design, in accordance with some embodiments ofthe present disclosure. EDA system 1000 is configured to implement oneor more operations of the method 900 disclosed in FIG. 9, and furtherexplained in conjunction with FIGS. 1A-8C. In some embodiments, EDAsystem 1000 includes an APR system.

In some embodiments, EDA system 1000 is a general purpose computingdevice including a hardware processor 1002 and a non-transitory,computer-readable storage medium 1004. Storage medium 1004, amongstother things, is encoded with, i.e., stores, computer program code(instructions) 1006, i.e., a set of executable instructions. Executionof instructions 1006 by hardware processor 1002 represents (at least inpart) an EDA tool which implements a portion or all of, e.g., the method900.

The processor 1002 is electrically coupled to computer-readable storagemedium 1004 via a bus 1008. The processor 1002 is also electricallycoupled to an I/O interface 1010 and a fabrication tool 1016 by bus1008. A network interface 1012 is also electrically connected toprocessor 1002 via bus 1008. Network interface 1012 is connected to anetwork 1014, so that processor 1002 and computer-readable storagemedium 1004 are capable of connecting to external elements via network1014. The processor 1002 is configured to execute computer program code1006 encoded in computer-readable storage medium 1004 in order to causeEDA system 1000 to be usable for performing a portion or all of thenoted processes and/or methods. In one or more embodiments, processor1002 is a central processing unit (CPU), a multi-processor, adistributed processing system, an application specific integratedcircuit (ASIC), and/or a suitable processing unit.

In one or more embodiments, computer-readable storage medium 1004 is anelectronic, magnetic, optical, electromagnetic, infrared, and/or asemiconductor system (or apparatus or device). For example,computer-readable storage medium 1004 includes a semiconductor orsolid-state memory, a magnetic tape, a removable computer diskette, arandom access memory (RAM), a read-only memory (ROM), a rigid magneticdisk, and/or an optical disk. In one or more embodiments using opticaldisks, computer-readable storage medium 1004 includes a compactdisk-read only memory (CD-ROM), a compact disk-read/write (CD-R/W),and/or a digital video disc (DVD).

In one or more embodiments, storage medium 1004 stores computer programcode 1006 configured to cause EDA system 1000 (where such executionrepresents (at least in part) the EDA tool) to be usable for performinga portion or all of the noted processes and/or methods. In one or moreembodiments, storage medium 1004 also stores information whichfacilitates performing a portion or all of the noted processes and/ormethods. In one or more embodiments, storage medium 1004 stores IClayout diagram 1020 of standard cells including such standard cells asdisclosed herein, for example, a cell including in the integratedcircuits 100 and/or 700 discussed above with respect to FIGS. 1A-11.

EDA system 1000 includes I/O interface 1010. I/O interface 1010 iscoupled to external circuitry. In one or more embodiments, I/O interface1010 includes a keyboard, keypad, mouse, trackball, trackpad,touchscreen, and/or cursor direction keys for communicating informationand commands to processor 1002.

EDA system 1000 also includes network interface 1012 coupled toprocessor 1002. Network interface 1012 allows EDA system 1000 tocommunicate with network 1014, to which one or more other computersystems are connected. Network interface 1012 includes wireless networkinterfaces such as BLUETOOTH, WIFI, WIMAX, GPRS, or WCDMA; or wirednetwork interfaces such as ETHERNET, USB, or IEEE-1064. In one or moreembodiments, a portion or all of noted processes and/or methods areimplemented in two or more systems 1000.

EDA system 1000 also includes the fabrication tool 1016 coupled toprocessor 1002. The fabrication tool 1016 is configured to fabricateintegrated circuits, e.g., the integrated circuits 10, 30, 30′, 40-80illustrated in FIGS. 1A-8C, according to the design files processed bythe processor 1002.

EDA system 1000 is configured to receive information through I/Ointerface 1010. The information received through I/O interface 1010includes one or more of instructions, data, design rules, libraries ofstandard cells, and/or other parameters for processing by processor1002. The information is transferred to processor 1002 via bus 1008. EDAsystem 1000 is configured to receive information related to a UI throughI/O interface 1010. The information is stored in computer-readablemedium 1004 as design specification 1022.

In some embodiments, a portion or all of the noted processes and/ormethods are implemented as a standalone software application forexecution by a processor. In some embodiments, a portion or all of thenoted processes and/or methods are implemented as a software applicationthat is a part of an additional software application. In someembodiments, a portion or all of the noted processes and/or methods areimplemented as a plug-in to a software application. In some embodiments,at least one of the noted processes and/or methods are implemented as asoftware application that is a portion of an EDA tool. In someembodiments, a portion or all of the noted processes and/or methods areimplemented as a software application that is used by EDA system 1000.In some embodiments, a layout diagram which includes standard cells isgenerated using a suitable layout generating tool.

In some embodiments, the processes are realized as functions of aprogram stored in a non-transitory computer readable recording medium.Examples of a non-transitory computer readable recording medium include,but are not limited to, external/removable and/or internal/built-instorage or memory unit, for example, one or more of an optical disk,such as a DVD, a magnetic disk, such as a hard disk, a semiconductormemory, such as a ROM, a RAM, a memory card, and the like.

FIG. 11 is a block diagram of IC manufacturing system 1100, and an ICmanufacturing flow associated therewith, in accordance with someembodiments. In some embodiments, based on a layout diagram, at leastone of (A) one or more semiconductor masks or (B) at least one componentin a layer of a semiconductor integrated circuit is fabricated using ICmanufacturing system 1100.

In FIG. 11, IC manufacturing system 1100 includes entities, such as adesign house 1120, a mask house 1130, and an IC manufacturer/fabricator(“fab”) 1150, that interact with one another in the design, development,and manufacturing cycles and/or services related to manufacturing an ICdevice 1160. The entities in IC manufacturing system 1100 are connectedby a communications network. In some embodiments, the communicationsnetwork is a single network. In some embodiments, the communicationsnetwork is a variety of different networks, such as an intranet and theInternet. The communications network includes wired and/or wirelesscommunication channels. Each entity interacts with one or more of theother entities and provides services to and/or receives services fromone or more of the other entities. In some embodiments, two or more ofdesign house 1120, mask house 1130, and IC fab 1150 is owned by a singleentity. In some embodiments, two or more of design house 1120, maskhouse 1130, and IC fab 1150 coexist in a common facility and use commonresources.

Design house (or design team) 1120 generates an IC design layout diagram1122. IC design layout diagram 1122 includes various geometricalpatterns, for example, an IC layout design depicted in FIGS. 3A, 4A, 5A,6A, 7A, and/or 8A, designed for an IC device 1160, for example, theintegrated circuits 10, 30, 30′, 40-80 illustrated in FIGS. 1A-8C. Thegeometrical patterns correspond to patterns of metal, oxide, orsemiconductor layers that make up the various components of IC device1160 to be fabricated. The various layers combine to form various ICfeatures. For example, a portion of IC design layout diagram 1122includes various IC features, such as an active region, gate electrode,source and drain, conductive segments or vias of an interlayerinterconnection, to be formed in a semiconductor substrate (such as asilicon wafer) and various material layers disposed on the semiconductorsubstrate. Design house 1120 implements a proper design procedure toform IC design layout diagram 1122. The design procedure includes one ormore of logic design, physical design or place and route. IC designlayout diagram 1122 is presented in one or more data files havinginformation of the geometrical patterns. For example, IC design layoutdiagram 1122 can be expressed in a GDSII file format or DFII fileformat.

Mask house 1130 includes data preparation 1132 and mask fabrication1144. Mask house 1130 uses IC design layout diagram 1122 to manufactureone or more masks 1145 to be used for fabricating the various layers ofIC device 1160 according to IC design layout diagram 1122. Mask house1130 performs mask data preparation 1132, where IC design layout diagram1122 is translated into a representative data file (“RDF”). Mask datapreparation 1132 provides the RDF to mask fabrication 1144. Maskfabrication 1144 includes a mask writer. A mask writer converts the RDFto an image on a substrate, such as a mask (reticle) 1145 or asemiconductor wafer 1153. The IC design layout diagram 1122 ismanipulated by mask data preparation 1132 to comply with particularcharacteristics of the mask writer and/or requirements of IC fab 1150.In FIG. 11, data preparation 1132 and mask fabrication 1144 areillustrated as separate elements. In some embodiments, data preparation1132 and mask fabrication 1144 can be collectively referred to as maskdata preparation.

In some embodiments, data preparation 1132 includes optical proximitycorrection (OPC) which uses lithography enhancement techniques tocompensate for image errors, such as those that can arise fromdiffraction, interference, other process effects and the like. OPCadjusts IC design layout diagram 1122. In some embodiments, datapreparation 1132 includes further resolution enhancement techniques(RET), such as off-axis illumination, sub-resolution assist features,phase-shifting masks, other suitable techniques, and the like orcombinations thereof. In some embodiments, inverse lithographytechnology (ILT) is also used, which treats OPC as an inverse imagingproblem.

In some embodiments, data preparation 1132 includes a mask rule checker(MRC) that checks the IC design layout diagram 1122 that has undergoneprocesses in OPC with a set of mask creation rules which contain certaingeometric and/or connectivity restrictions to ensure sufficient margins,to account for variability in semiconductor manufacturing processes, andthe like. In some embodiments, the MRC modifies the IC design layoutdiagram 1122 to compensate for limitations during mask fabrication 1144,which may undo part of the modifications performed by OPC in order tomeet mask creation rules.

In some embodiments, data preparation 1132 includes lithography processchecking (LPC) that simulates processing that will be implemented by ICfab 1150 to fabricate IC device 1160. LPC simulates this processingbased on IC design layout diagram 1122 to create a simulatedmanufactured device, such as IC device 1160. The processing parametersin LPC simulation can include parameters associated with variousprocesses of the IC manufacturing cycle, parameters associated withtools used for manufacturing the IC, and/or other aspects of themanufacturing process. LPC takes into account various factors, such asaerial image contrast, depth of focus (“DOF”), mask error enhancementfactor (“MEEF”), other suitable factors, and the like or combinationsthereof. In some embodiments, after a simulated manufactured device hasbeen created by LPC, if the simulated device is not close enough inshape to satisfy design rules, OPC and/or MRC are be repeated to furtherrefine IC design layout diagram 1122.

It should be understood that the above description of data preparation1132 has been simplified for the purposes of clarity. In someembodiments, data preparation 1132 includes additional features such asa logic operation (LOP) to modify the IC design layout diagram 1122according to manufacturing rules. Additionally, the processes applied toIC design layout diagram 1122 during data preparation 1132 may beexecuted in a variety of different orders.

After data preparation 1132 and during mask fabrication 1144, a mask1145 or a group of masks 1145 are fabricated based on the modified ICdesign layout diagram 1122. In some embodiments, mask fabrication 1144includes performing one or more lithographic exposures based on ICdesign layout diagram 1122. In some embodiments, an electron-beam(e-beam) or a mechanism of multiple e-beams is used to form a pattern ona mask (photomask or reticle) 1145 based on the modified IC designlayout diagram 1122. Mask 1145 can be formed in various technologies. Insome embodiments, mask 1145 is formed using binary technology.

In some embodiments, a mask pattern includes opaque regions andtransparent regions. A radiation beam, such as an ultraviolet (UV) beam,used to expose the image sensitive material layer (for example,photoresist) which has been coated on a wafer, is blocked by the opaqueregion and transmits through the transparent regions. In one example, abinary mask version of mask 1145 includes a transparent substrate (forexample, fused quartz) and an opaque material (for example, chromium)coated in the opaque regions of the binary mask. In another example,mask 1145 is formed using a phase shift technology. In a phase shiftmask (PSM) version of mask 1145, various features in the pattern formedon the phase shift mask are configured to have proper phase differenceto enhance the resolution and imaging quality. In various examples, thephase shift mask can be attenuated PSM or alternating PSM. The mask(s)generated by mask fabrication 1144 is used in a variety of processes.For example, such a mask(s) is used in an ion implantation process toform various doped regions in semiconductor wafer 1153, in an etchingprocess to form various etching regions in semiconductor wafer 1153,and/or in other suitable processes.

IC fab 1150 includes wafer fabrication 1152. IC fab 1150 is an ICfabrication business that includes one or more manufacturing facilitiesfor the fabrication of a variety of different IC products. In someembodiments, IC Fab 1150 is a semiconductor foundry. For example, theremay be a manufacturing facility for the front end fabrication of aplurality of IC products (front-end-of-line (FEOL) fabrication), while asecond manufacturing facility may provide the back end fabrication forthe interconnection and packaging of the IC products (back-end-of-line(BEOL) fabrication), and a third manufacturing facility may provideother services for the foundry business.

IC fab 1150 uses mask(s) 1145 fabricated by mask house 1130 to fabricateIC device 1160. Thus, IC fab 1150 at least indirectly uses IC designlayout diagram 1122 to fabricate IC device 1160. In some embodiments,semiconductor wafer 1153 is fabricated by IC fab 1150 using mask(s) 1145to form IC device 1160. In some embodiments, the IC fabrication includesperforming one or more lithographic exposures based at least indirectlyon IC design layout diagram 1122. Semiconductor wafer 1153 includes asilicon substrate or other proper substrate having material layersformed thereon. Semiconductor wafer 1153 further includes one or more ofvarious doped regions, dielectric features, multilevel interconnects,and the like (formed at subsequent manufacturing steps).

As described above, integrated circuits and the methodology in thepresent disclosure utilize the excellence of hybrid row architecture inreducing shadowed cell area, timing and power overhead by half whileextending cell TDDB lifetime.

In some embodiments, an integrated circuit is disclosed, including asemiconductor device. The semiconductor device includes several firstcell rows extending in a first direction, each of the first cell rowshaving a first row height; several second cell rows extending in thefirst direction, each of the second cell rows having a second row heightsmaller than the first row height, in which the first cell rows and thesecond cell rows are interlaced; a first cell arranged in a first row ofthe first cell rows; and at least one second cell arranged in at leastone row of the second cell rows, in which the at least one second cellabuts the first cell in a second direction different from the firstdirection, in which the at least one second cell and at least onecircuit component included in the first cell have the same operationconfiguration. In some embodiments, the at least one row of the secondcell rows includes: a first row includes a first active area of Pconductive type; and a second row includes a second active area of Nconductive type; in which the first and second rows of the second cellrows are arranged at the opposite sides of the first row of the firstcell rows. In some embodiments, the first cell includes several firstactive areas, and the at least one second cell include several secondactive areas; In which the semiconductor device further includes: atleast one gate extending in the second direction and crossing the firstactive areas and the second active areas. In some embodiments, the atleast one second cell includes: a first active area and a second activearea extending in the first direction, in which the first active areaand the second active area have different conductivity types; and atleast one conductive pattern extending in the second direction; in whichthe first active area is arranged closer to the first cell abutting theat least one second cell, compared with the second active area; in whichthe at least one conductive pattern crosses the first active area. Insome embodiments, the at least one conductive pattern is configured tobe as terminals of a first transistor included in the first cell and asecond transistor included in the at least one second cell; in which thefirst transistor and the second transistor are configured to receive asignal at gate terminals thereof, and have first terminals coupled witheach other and second terminals coupled with each other. In someembodiments, the at least one second cell includes a first active areaand the first cell includes a second active area; in which theintegrated circuit further includes: at least one conductive patternextending in the second direction and crossing the first and secondactive areas. In some embodiments, the semiconductor further includes athird cell configured to be the same as the at least one second cell, inwhich the third cell is arranged in a first row of the second cell rows;in which the first row and the at least one row of the second cell rowsare arranged at the opposite sides of the first row of the first cellrow. In some embodiments, the at least one second cell includes a firstcell and a second cell, and the first cell includes a first active areaof a first type and the second cell includes a second active area of asecond type different from the first type; In which the first and secondcell of the at least one second cell are arranged at the opposite sidesof the first cell. In some embodiments, the semiconductor furtherincludes a third cell different from the first cell and the at least onesecond cell, in which the at least one second cell is arrangedinterposed between the first and third cells; in which the first cell,the at least one second cell, and the third cell are configured tocooperate as a logic circuit.

Also disclosed is an integrated circuit that includes an integratedcircuit. The integrated circuit includes a first circuit comprisingseveral first transistors each having a two-fins active area structure;and a second circuit comprising at least one second transistor having aone-fin active area structure; in which the at least one secondtransistor and at least one of the first transistors are coupled to eachother in parallel and are configured to cooperate in response to a firstsignal at gates of the at least one second transistor and the at leastone of the first transistors. In some embodiments, the at least onesecond transistor includes several second transistors; in which each oneof the first transistors is coupled to a corresponding one of the secondtransistors in parallel, and each one of the first transistors and thecorresponding one of the second transistors are configured to receivethe same signal at gates thereof. In some embodiments, the at least onesecond transistor and the at least one of the first transistors have thesame conductivity type. In some embodiments, the at least one secondtransistor and the at least one of the first transistors share a gatestructure configured to be as the gates thereof and several conductivepatterns configured to be coupled terminals thereof; in which the gatestructure and the conductive patterns cross the one-fin active areastructure and the two-fins active area structure in a layout view. Insome embodiments, the first circuit operates in a faster speed comparedwith the second circuit. In some embodiments, the first circuit arearranged in a first cell row having a first row height and the secondcircuit are arranged in a second cell row having a second row heightdifferent from the first row height; in which the first cell row and thesecond cell row abut each other in a layout view.

Also disclosed is a system including a non-transitory storage mediumencoded with a set of instructions; and a hardware processorcommunicatively coupled with the non-transitory storage medium andconfigured to execute the set of instructions, the set of instructionsbeing configured to cause the processor to: obtain, based on a netlistof a circuit, several values each corresponding to one of severaltransistors included in the circuit; compare the values with a thresholdvalue; in response to the comparison, generate an adjusted netlist ofthe circuit by adding several redundant transistors; and determine,based on the adjusted netlist, one of several layout configurations forthe circuit, in which the layout configurations include several firstcell rows each having a first cell height and several second cell rowseach having a second cell height different from the first cell height.In some embodiments, the redundant transistors includes several firstredundant transistors of a first type and several second redundanttransistors of a second type different from the first type; in which theset of instructions is configured to cause the processor further to:determine one of the layout configurations based on a number of thefirst redundant transistors and a number of the second redundanttransistors. In some embodiments, the layout configurations includes: afirst layout configuration, in which at least one of the first redundanttransistors and at least one of the second redundant transistors arearranged in the second cell rows; a second layout configuration, inwhich at least one of the first redundant transistors is arranged in afirst row of the second cell rows; and a third layout configuration, inwhich at least one of the second redundant transistors is arranged in asecond row of the second cell rows. In some embodiments, the redundanttransistors includes several first redundant transistors of a first typeand several second redundant transistors of a second type different fromthe first type; in which the layout configuration includes a firstlayout configuration, in which at least one of the first redundanttransistors and at least one of the second redundant transistors arearranged in different rows in the second cell rows. In some embodiments,the set of instructions is configured to cause the processor further to:determine, based on resistor-and-capacitor values of routing, one of thelayout configurations for the circuit.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

1. A semiconductor device, comprising: a plurality of first cell rowsextending in a first direction, each of the first cell rows having afirst row height; a plurality of second cell rows extending in the firstdirection, each of the second cell rows having a second row heightsmaller than the first row height, wherein the plurality of first cellrows and the plurality of second cell rows are interlaced; a first cellarranged in a first row of the plurality of first cell rows; and atleast one second cell arranged in at least one row of the plurality ofsecond cell rows, wherein the at least one second cell abuts the firstcell in a second direction different from the first direction, whereinthe at least one second cell and at least one circuit component includedin the first cell have the same operation configuration.
 2. Thesemiconductor device of claim 1, wherein the at least one row of theplurality of second cell rows comprises: a first row that comprises afirst active area of P conductive type; and a second row that comprisesa second active area of N conductive type; wherein the first and secondrows of the plurality of second cell rows are arranged at the oppositesides of the first row of the plurality of first cell rows.
 3. Thesemiconductor device of claim 1, wherein the first cell comprises aplurality of first active areas, and the at least one second cellcomprise a plurality of second active areas; wherein the semiconductordevice further comprises: at least one gate extending in the seconddirection and crossing the plurality of first active areas and theplurality of second active areas.
 4. The semiconductor device of claim1, wherein the at least one second cell comprises: a first active areaand a second active area extending in the first direction, wherein thefirst active area and the second active area have different conductivitytypes; and at least one conductive pattern extending in the seconddirection; wherein the first active area is arranged closer to the firstcell abutting the at least one second cell, compared with the secondactive area; wherein the at least one conductive pattern crosses thefirst active area.
 5. The semiconductor device of claim 4, wherein theat least one conductive pattern is configured to be as terminals of afirst transistor included in the first cell and a second transistorincluded in the at least one second cell; wherein the first transistorand the second transistor are configured to receive a signal at gateterminals thereof, and have first terminals coupled with each other andsecond terminals coupled with each other.
 6. The semiconductor device ofclaim 1, wherein the at least one second cell comprises a first activearea and the first cell comprises a second active area; wherein thesemiconductor device further comprises: at least one conductive patternextending in the second direction and crossing the first and secondactive areas.
 7. The semiconductor device of claim 1, furthercomprising: a third cell configured to be the same as the at least onesecond cell, wherein the third cell is arranged in a first row of theplurality of second cell rows; wherein the first row and the at leastone row of the plurality of second cell rows are arranged at theopposite sides of the first row of the plurality of first cell rows. 8.The semiconductor device of claim 1, wherein the at least one secondcell comprises a first cell and a second cell, and the first cellcomprises a first active area of a first type and the second cellcomprises a second active area of a second type different from the firsttype; wherein the first and second cell of the at least one second cellare arranged at the opposite sides of the first cell.
 9. Thesemiconductor device of claim 1, further comprising: a third celldifferent from the first cell and the at least one second cell, whereinthe at least one second cell is arranged interposed between the firstand third cells; wherein the first cell, the at least one second cell,and the third cell are configured to cooperate as a logic circuit. 10.An integrated circuit, comprising: a first circuit comprising aplurality of first transistors each having a two-fins active areastructure; and a second circuit comprising at least one secondtransistor having a one-fin active area structure; wherein the at leastone second transistor and at least one of the plurality of firsttransistors are coupled to each other in parallel and are configured tocooperate in response to a first signal at gates of the at least onesecond transistor and the at least one of the plurality of firsttransistors.
 11. The integrated circuit of claim 10, wherein the atleast one second transistor comprises a plurality of second transistors;wherein each one of the plurality of first transistors is coupled to acorresponding one of the plurality of second transistors in parallel,and each one of the plurality of first transistors and the correspondingone of the plurality of second transistors are configured to receive thesame signal at gates thereof.
 12. The integrated circuit of claim 10,wherein the at least one second transistor and the at least one of theplurality of first transistors have the same conductivity type.
 13. Theintegrated circuit of claim 12, wherein the at least one secondtransistor and the at least one of the plurality of first transistorsshare a gate structure configured to be as the gates thereof and aplurality of conductive patterns configured to be coupled terminalsthereof; wherein the gate structure and the plurality of conductivepatterns cross the one-fin active area structure and the two-fins activearea structure in a layout view.
 14. The integrated circuit of claim 10,wherein the first circuit operates in a faster speed compared with thesecond circuit.
 15. The integrated circuit of claim 10, wherein thefirst circuit are arranged in a first cell row having a first row heightand the second circuit are arranged in a second cell row having a secondrow height different from the first row height; wherein the first cellrow and the second cell row abut each other in a layout view. 16-20.(canceled)
 21. An integrated circuit, comprising: a first transistor ofa first conductivity type in a main logic circuit, arranged in a firstcell row having a first row height; and a second transistor of the firstconductivity type in a shadow logic circuit, arranged in a second cellrow having a second row height different from the first row height,wherein the first cell row abuts the second cell row, wherein firstterminals of the first and second transistors are coupled to each other,second terminals of the first and second transistors are coupled to eachother, and gate terminals of the first and second transistors areconfigured to receive a first signal.
 22. The integrated circuit ofclaim 21, further comprising: a third transistor of a secondconductivity type, different from the first conductivity type, in themain logic circuit, arranged in the first cell row; and a fourthtransistor of the second conductivity type in the shadow logic circuit,arranged in a third cell row having the second row height, wherein thefirst cell row is arranged between the second and third cell rows,wherein third terminals of the third and fourth transistors are coupledto each other, fourth terminals of the third and fourth transistors arecoupled to each other, and gate terminals of the third and fourthtransistors are configured to receive a second signal different from thefirst signal.
 23. The integrated circuit of claim 22, furthercomprising: first to third active areas extending in a first direction,wherein the first active area is included in a structure operating asthe first transistor, the second active area is included in a structureoperating as the second transistor, and the third active area isincluded in a structure operating as the third transistor, wherein thefirst active area is arranged between the second active area and thethird active area.
 24. The integrated circuit of claim 21, wherein thefirst cell row and the second cell row extend in a first direction,wherein the first and second transistor share a gate structurecorresponding to the gate terminals thereof, and the gate structureextends in a second direction and passes through the first and secondcell rows.
 25. The integrated circuit of claim 21, wherein the firstcell row is greater than the second cell row.